[SLAC]
[SLAC Pubs and Reports]
SLAC-PUB-7778
Influence of Miscut on Crystal Truncation Rod Scattering
Abstract
X rays can be used to measure the roughness of a surface by studying
Crystal Truncation Rod scattering. It is shown that for a simple cubic
lattice the presence of a miscut surface with a regular step array has
no effect on the scattered intensity of a single rod and that a
distribution of terrace widths on the surface is shown to have the
same effect as adding roughness to the surface. For a perfect
crystal without miscut, the scattered intensity is the sum of the
intensity from all the rods with the same in-plane momentum
transfer. For all real crystals the scattered intensity is better
described as that from a single rod. It is shown that data collection
strategies must correctly account for the sample miscut or there is a
potential for improperly measuring the rod intensity. This can result
in an asymmetry in the rod intensity above and below the Bragg peak,
which can be misinterpreted as being due to a relaxation of the
surface. The calculations presented here are compared with data taken
for silicon(001) wafers with 0.1 and 4 degree miscuts.
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