Karl M. Ecklund, Keith W. Hartman, Michael J. Hebert, Stanley G. Wojcicki,

"Etching of Copper Coated Mylar Tubes with CF4 Gas"

SLAC-JOURNAL-ICFA-12-7


[ Full Article | Questions & Answers | Help | IIB Home Page ]


Abstract:

Using 5 mm diameter copper coated mylar straw tubes at a potential of 2.30 KV relative to a concentric 20 micrometer diameter gold-plated tungsten anode, it has been observed that with very low flow rates of CF4-based gases the conductive copper cathode material may be removed entirely from the mylar surface.


Last modified: 25 Apr 1996, Jochen.