HER XPOS:
+200 µm on the HER IP XPOS knob.
HER XANG:
+100 µR on the HER IP XANG knob.
HER YPOS:
+200 µm on the HER IP YPOS knob.
HER YANG:
+100 µR on the HER IP YANG knob.
LER XPOS:
+200 µm on the LER IP XPOS knob.
LER XANG:
+100 µR on the LER IP XANG knob.
LER YPOS:
+200 µm on the LER IP YPOS knob.
LER YANG:
+100 µR on the LER IP YANG knob.