Hardware Specifications for IFR Gas Mixer (Doug Wright, wright@slac.stanford.edu) MKS manuals and data sheets: http://www.mksinst.com/pdf/ Flow Control ------------ MKS Type 246 Controller Readout MKS 2179 Mass Flow Controllers (has NUPRO positive shutoff valve) http://www.mksinst.com/cgi-bin/product.exe?pid=1179A Max gauge SCCM factor 10000 Freon 100 2179A 14C R1BV 5000 Isobutane 50 2179A 53C R1BV 5000 Argon 50 2179A 53C R1BV 2000 Spare 100 2179A Flow Monitors ------------- MKS Type 660 mod 120 Readout MKS Type 358c flow monitor MAX SCCM 10000 Freon 358C 10000 RV 5000 Isobutane 358C 05000 RV 5000 Argon 358C 05000 RV 2000 Spare 5000 Output flow 358C 14024 (has positive shutoff valve) Pressure Monitor ---------------- MKS Type 660 mod 120 Readout (same transducer for all pressure measurements) MKS Type 750B RDP CD 2GA pressure transducer 0-10v 0-250 psi Note: ===== MKS 358c flow meter replaced by 179A http://www.mksinst.com/MD1.html accuracy 1% of full scale MKS Main (Massachusets) 800-227-8766 Local (San Jose) 408-750-0300 Other: Sunnyvale Valve & Fitting 408-734-3145 558 LxH mm 181x135 179 124x140 358 149x122 shutoff valves standalone Nupro SS-4BK-V51-1C integral Nupro N53114 6LV-RD6901-C Interlock Limits ================ PTI&II Sensors MKS 146 High limit 1700 torr Low limit 1000 torr Cycler high 1600 torr low 1500 Input gases MKS 660 OLD flow pressure high low high low Spare 1100 800 50 0 Argon 1900 1500 60 16 Iso. 1100 800 50 15 before 6-19-03 12 6-19-03 Freon 10500 8000 60 15 Mix 75000 -620 20 -2 SLD hardware ------------ Sierra flo-box series 900 readout module (one) Sierra side track III 800 sccm Ar controller Sierra 840L 50 sccm isobutane controller psi psi sccm in out iso 50 21 1 840L-2-0V1-sv1-e-v1-s1 co2 500 25 0 840L-2-0N1-sk1-e-v1-s1 Ar 800 Freon 1000 25 0 MKS 660 Readout ------- HH and HL are hysteresis settings for the high and low setpoints These control how the alarms are DE-activated. When a value exceeds the set point value the alarm is activated. The alarm is not deactivated until it falls below the set point + hysteresis.